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Process control monitoring : ウィキペディア英語版 | Process control monitoring
In the application of integrated circuits, process control monitoring (PCM) is the procedure followed to obtain detailed information about the process used. PCM is associated with designing and fabricating special structures that can monitor technology specific parameters such as Vth in CMOS and Vbe in bipolars. These structures are placed across the wafer at specific locations along with the chip produced so that a closer look into the process variation is possible.
抄文引用元・出典: フリー百科事典『 ウィキペディア(Wikipedia)』 ■ウィキペディアで「Process control monitoring」の詳細全文を読む
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